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Initially, the chip will be quite expensive. Motorola said the first models will sell for $487 each, close to the price of the 68000 when it was first brought out in 1979. But as with all semiconductor products, the price of the 68000 plummetted as volume production began, and it now sells for about $15. ''We have every reason to believe the experience with the 68020 will be the same,'' said Murray A. Goldman, corporate vice president and general manager of Motorola's microprocessor division, in a recent interview. In 1985, he said, the company would likely ship only 100,000 units of the new chip.
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According to a source quoted from https://en.wikipedia.org/wiki/MOS_Technology_6502 "The first 6502 was fabricated with 8 micron technology"; that would have been in 1975.

According to a comment in Limiting factor on sprite sizes "VIC-II and amiga OCS chipset were both using 5um technology" so they reached that process node no later than 1982.
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Having found more datasheets, I’m going to push back the date I originally gave. The first major upgrade to the 650x line, probably representing a process upgrade, was to increase the speed from 1MHz in 1975 to to 2MHz, announced as “Preliminary” in May 1976. MOS made available the 3MHz models of its line no later than March 1980.

This site claims that, in 1984, MOS was manufacturing the 7501 in “HMOS-I” (which would be 3.5µm) and the 8501 in “HMOS-II” (2µm), implying that MOS had gone at least two steps past 5µm by 1984.

Therefore, MOS built its 8µm fab in 1974 and probably upgraded its CPU manufacturing from 8µm to 5µm in late 1976, which was three years after HP and around the same time as Intel. (Or perhaps there was another step along the way?) It apparently then upgraded to a HMOS-I process in 1980 and HMOS-2 in 1984, so approximately once every four years.
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